Self-Powered and Soft Polymer MEMS/NEMS Devices
Springer, Apr 5, 2019 - Technology & Engineering - 85 pages
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive.
This multidisciplinary book is appropriate for students and professionals in the fields of material science, mechanical engineering, electrical engineering, and bioengineering.
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2DOF acoustic ambient energy applications batteries biomimetic cantilever crocodiles cupula d33 mode demonstrated detect developed dielectric dipole electret electret-based electrical energy electroactive polymers electrode electromagnetic electrospinning electrospinning process electrostatic energy harvesting device energy scavenging Engineering environment fabricated Figure reproduced fishes flexible flow sensing flow sensors Groningen hair cell harbor seals https://doi hydrogel hydrogel cupula IEEE in-plane gap Journal of Micromechanics Kevlar Kevlar fiber Kottapalli layer magnetic magnetostrictive maximum membrane MEMS/NEMS Miao micro micro-patterning Micromechanics and Microengineering nanofibers nanowire arrays nanowires neuromasts out-of-plane output piezoelectric effect piezoelectric energy harvesters piezoelectric materials piezoelectric nanofibers piezoelectric polymers piezoelectric properties polyimide polymer-based polyvinylidene fluoride power source pressure sensors PVDF receptors Schematic diagram showing self-powered sensors sensing element shown in Fig silicon Smart Materials stereocilia strain substrate surface Technology Triboelectric Nanogenerators underwater velocity vibration energy harvester voltage Wang whiskers wireless WSN nodes zinc oxide zinc oxide nanowires ZnO nanowire